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VINSE - Vanderbilt Institute of Nanoscale Science and Engineering

VINSE - Vanderbilt Institute of Nanoscale Science and Engineering
  2. Facilities
  3. Instruments
  4. Tube Furnace #2 - Lindberg Blue M

Tube Furnace #2 - Lindberg Blue M

Overview

Contact: VINSE Cleanroom
ESB 111 - Cleanroom
615-343-1468

Fee Structure

Get Access - Vanderbilt
Get Access - Non-Vanderbilt

The Lindberg Blue M 1-inch Thermal Furnace is a tool for chemical vapor deposition (CVD), annealing, and oxidation at low pressure or atmospheric pressure and with or without process gases in a 1 inch diameter quartz tube.  The tube pressure, temperature, and gas flow rates are tunable.

Capabilites

  • Furnace temperature:
    • Range: 20 oC to  1100 oC
    • Ramp rate controllable
    • Heating time: 20 oC to  1050 oC in 22 minutes
    • Cooling time: 1050 oC to  <150 oC in 45 minutes
  • Process gases
    • Argon (Ar)
    • Nitrogen (N2)
    • Oxygen (O2)
    • Hydrogen (H2)
    • Methane (CH4)
    • Ethylene (C2 H4)
    • *Capacity for acetylene (C2 H2), discuss with staff
  • Furnace pressure
    • Range: 18 mTorr to 760 Torr
    • Pumpdown rates: 760 Torr to 30 mTorr in 5 minutes, 760 Torr to ~22 mTorr in 40 minutes
  • Maximum sample size: 85 inches (2.15cm) - inner diameter of tube
  • Sample holders
    • Quartz boats with magnetic handles (9 cm x 1.6 cm x 1 cm) for graphene growth and wet oxidation
    • Quartz boats (9.5 cm x 1.2 cm x 1.1 cm) for dry oxidation and polymer pyrolysis
    • Alumina boats (4.7 cm x 0.8 cm x 1 cm, 4.6 cm x 1.6 cm x 2cm, 9.4 cm x 1.3 cm x 2.0 cm) for precursor materials and delicate samples
  • Alternate exhausts
    • Liquid nitrogen cold trap
    • Oxygen+argon bubbler exhaust
  • Sublimation side chamber available (20 oC to 600 oC)