Tube Furnace

Lindberg Blue M (1″)

Overview

Tube Furnace

The Lindberg Blue M 1-inch Thermal Furnace is a tool for chemical vapor deposition (CVD), annealing, and oxidation at low pressure or atmospheric pressure and with or without process gases in a 1 inch diameter quartz tube.  The tube pressure, temperature, and gas flow rates are tunable.

Capabilities

Tube Furnace Photo
Graphene film (dark and medium blue) grown on copper foil and transferred to a silicon chip with a 300 nm layer of silicon dioxide (purple). Chromium alignment markers (golden) patterned with the Karl Suss MA-6 mask aligner and the Angstrom Amod Resistive Deposition System.
  • Furnace temperature:
    • Range: 20 oC to  1100 oC
    • Ramp rate controllable
    • Heating time: 20 oC to  1050 oC in 22 minutes
    • Cooling time: 1050 oC to  <150 oC in 45 minutes
  • Process gases
    • Argon (Ar)
    • Oxygen (O2)
    • Hydrogen (H2)
    • Methane (CH4)
    • Ethylene (C2H4)
  • Furnace pressure
    • Range: 18 mTorr to 760 Torr
    • Pumpdown rates: 760 Torr to 30 mTorr in 5 minutes, 760 Torr to ~22 mTorr in 40 minutes
  • Maximum sample size: 85 inches (2.15cm) - inner diameter of tube
  • Sample holders
    • Quartz boats with magnetic handles (9 cm x 1.6 cm x 1 cm) for graphene growth and wet oxidation
    • Quartz boats (9.5 cm x 1.2 cm x 1.1 cm) for dry oxidation and polymer pyrolysis
    • Alumina boats for precursor materials and delicate samples
  • Alternate exhausts
    • Liquid nitrogen cold trap
    • Oxygen+argon bubbler exhaust
  • Sublimation side chamber available (20 oC to 600 oC)
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Contact

  • VINSE Cleanroom

    VINSE Cleanroom

    Dr. Ben Schmidt, Manager

    Dr. Christina McGahan
    Megan Dernberger

    • 111 Engineering Science Building

Get Access

Vanderbilt User Access
External User Access