Overview
The MTI OTF-1200X is a two-zone furnace with 4-inch (100 mm) diameter max tube size for thermal annealing and oxidation processes. Multiple quartz tubes are available for specific process types.
Capabilities
- Process gases: Ar, C2H2, CH4, H2, O2
- Temperature range:
- 25-1200℃ (atmospheric pressure)
- 25-1000℃ (vacuum, <100 mtorr base vacuum)
- Heating rate: 20℃ / minute
- Sample size: Up to 90 mm diameter
- Quartz and alumina boats are available for mounting wafers and samples
Contact
-
VINSE Cleanroom
Dr. Ben Schmidt, Manager
Dr. Christina McGahan
Megan Dernberger- 111 Engineering Science Building