Sputter Deposition

AJA ATC-2200

Overview

AJA

The AJA ATC-2200 system is a versatile physical vapor deposition system used to deposit and co-deposit  insulators, semiconductors, and metals through DC and RF sputtering.  

AJA Image
ITO (In2O3/SnO2) coated glass slides that serve as electrodes in a microfluidics electromechanical flow capacitor (µ-EFC), allowing for simultaneous collection of optical and electrochemical measurements. Fabricated using the AJA ATC-2200 Sputter Deposition system and Rapid Thermal Processor SSI Solaris 150 in the VINSE Cleanroom. (Brandon Stacks, Deyu Li Group and Luo Groups)
AJA Image
HfO2 for optical transparency un the mid-IR and gate oxides on silicon chips. Fabricated using the AJA ATC-2200 Sputter Deposition system in the VINSE Cleanroom. (Megan Dernberger, VINSE)

Capabilities

  • 4 ST-30 HV sputtering sources with 75 mm targets
  • Sputter up setup - sample sits at the top of the chamber
  • Co-deposition capabilities (up to 2 RF + 1 DC simultaneously)
  • Current deposition materials:
    • Ag, Al, Al2O3, Cr, Cu, Ge, HfO2, ITO (In2O3/SnO2 target), KTN (Potassium Tantalate Niobate), LiO2, Mg, Ni, Si, Si3N4, SiO2, Ti, TiO2, V, VOx, W, Y2O3
    • Co-sputtering recipes available: CrV, Ag99Al01
    • Additional materials available upon request
  • Process gasses: Argon, N2, O2
  • Sample holder rotation
  • Sample size:
    • 5.55 inch (14 cm) diameter region for mounting samples on flat sample holders
    • Wafer holders are available for 3 inch (75 mm) and 4 inch (100 mm) wafers
  • Sample heating available up to 800°C
  • PID loop and manual control capabilities during deposition
  • Sample load lock reaches base pressure after 5 minute pump down
AJA Image
Vanadium oxide (VOx, left) and chromium doped vanadium oxide (Cr:VO2, right) deposited on silicon chips for strain induced phase transition at lower temperatures. Fabricated in the VINSE Cleanroom using the AJA ATC-2200 Sputter Deposition system. (Adam Cummings and Matthew Lu, Haglund Group)
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Contact

  • VINSE Cleanroom

    VINSE Cleanroom

    Dr. Ben Schmidt, Manager

    Dr. Christina McGahan
    Megan Dernberger

    • 111 Engineering Science Building

Get Access

Vanderbilt User Access
External User Access