Overview
![Spectroscopic Ellipsometer](http://www.vanderbilt.edu/vinse/wp-content/uploads/sites/40/2024/03/spectroscopic-ellipsometer.jpg)
The J.A. Woollam M-2000VI ellipsometer measures the refractive index and thickness of thin films. The spectral range is 371.3nm - 1688.7nm, and optional heat and liquid cells allow for measurement under various environmental conditions.
Capabilities
- Operating range from UV 370 nm extended to NIR 1690nm
- 370-1000nm, 390 wavelengths, 1005-1690nm, 190 wavelengths
- Detector CCD
- Angle of incidence range: 15 °- 90 °
- Modular optical design
- Data acquisition rate (complete Spectrum) 0.05 seconds (2-5 seconds is typical)
- Max substrate thickness 18 mm
- Heat cell to control the sample temperature from room temperature to 300 ° Purge gas capability
- LiquidCell with capacity 5 mL and angle of incidence 75° to fit 50 mm silicon wafers and 3x1 inch glass microscope slides
- Combined QCM-D/Ellipsometry setup for real-time characterization of thin molecular films with the angle of incidence of 65°
- Measure thin film thickness and optical constants
- Measure the optical constants (both n and k) from any type of material, whether dielectric, organic, semiconductor, or metal
- Sensitive to less than a monolayer of material (sub-nm) on a surface and yet can determine thickness for transparent films up to tens of microns
Contact
-
Dr. Dmitry Koktysh
VINSE Analytical Laboratory
- 107 Engineering Science Building