Overview
The Advanced Micromachining Tools (AMMT) MPSB 100 Porous Silicon Etcher is a double cell HF tank for porous silicon etching and electro-polishing.
Capabilities
- Sample size: 4 inch (100 mm) round
- HF exposure area: 86 mm
- Process parameter limitations:
- Current: 0 - 12 A
- Time: 0 s - 1 hour
- Etchant volume: 1.3 L
- AMMT PS2 Control software
- Electrical isolation between chambers
- > 105 Ω when bayonette catch is closed with isolating wafer substitute
- Etchant compatibility
- HF-reagent alcohol mixtures
Contact
-
VINSE Cleanroom
Dr. Ben Schmidt, Manager
Dr. Christina McGahan
Megan Dernberger- 111 Engineering Science Building