Overview
The Harrick Plasma Cleaner (PDC-32G) can be used for benchtop PDMS roughening and activation for PDMS-PDMS or PDMS-Glass bonding using CDA and O2. This technique is used frequently for microfluidics and soft lithography.
Capabilities
- Gases: Compressed dry air (CDA), O2
- Quartz chamber and sample carrier
- Sample size: <3 inch diameter x 6.5 inch length
- Adjustable RF power settings - Low, Medium, High
- Maximum RF power: 18W
- Active fan cooling
- PlasmaFlo gas mixer - quantitative flow control of process gases and chamber vacuum
Contact
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VINSE Cleanroom
Dr. Ben Schmidt, Manager
Dr. Christina McGahan
Megan Dernberger- 111 Engineering Science Building