Overview
The YES-310TA oven is a vapor-prime and image reversal oven from Yield Engineering Systems. The YES-310TA oven uses hexamethyldisilazane (HMDS) to vapor prime for improved photoresist adhesion to non-organic samples. Ammonia can be used for image reversal to reverse the tone of positive photoresists upon request.
Capabilities
- Maximum sample size: 200 mm or 7.8 inches
- Chamber size: 12”x 13.25”x 12”
- Operation temperature: 30°C to 160°C
- Gases: N2., NH3, HMDS vapor
- Two vapor prime loads per hour; one image reversal image load per hour
- Temperature uniformity: ± 5°C after stabilization period
Contact
-
VINSE Cleanroom
Dr. Ben Schmidt, Manager
Dr. Christina McGahan
Megan Dernberger- 111 Engineering Science Building