Environmental Scanning Electron Microscope
Instrument Location: Jacobs Hall 147
Civil and Environmental Engineering Department
FEI FEG Quanta 650
The FEI FEG Quanta 650 Environmental Scanning Electron Microscope (ESEM) provides three modes (high vacuum, low vacuum and ESEM) for electron imaging and a large chamber to accommodate a wide range of samples. The ESEM mode provides for a gaseous environment in the sample chamber, which allows for imaging of non-conductive samples with no additional conductive coatings needed. The high/low vacuum modes provide for traditional SEM imaging. For all modes, both secondary electron imaging and backscatter electron imaging are available at magnifications up to 150 000x. The Q650 is also equipped with an Oxford Ultim Max 170 large area energy dispersive spectrometer (EDS) and Oxford Nordlys electron backscatter diffraction detector (EBSD) to provide for large area mapping of the chemical signature of a sample surface and high resolution analytics.
Detectors Available:
Everhart Thornley Detector – for secondary electron imaging in high/low vacuum modes
Gaseous Secondary Electron Detector (GSED) – for secondary electron imaging in ESEM mode
Large Field Detector (LFD) – for imaging in low vacuum/ESEM modes
GSED/GAD combo detector – for secondary electron and backscatter electron imaging in ESEM mode
Additional Accessories:
Peltier cooling stage – maintains water on the sample by controlling temperature ±20°C from ambient
Various stage poles, including different angles for properly locating EBSD samples
Multi-sample pole mount – can accommodate up to 6 samples
Usage of the ESEM is charged on an hourly basis. All training and reservations for the Q650 ESEM are handled via MDERFH’s iLab Core.