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Environmental Scanning Electron Microscope

Instrument Location: Jacobs Hall 147

Civil and Environmental Engineering Department

FEI FEG Quanta 650

The FEI FEG Quanta 650 Environmental Scanning Electron Microscope (ESEM) provides three modes (high vacuum, low vacuum and ESEM) for electron imaging and a large chamber to accommodate a wide range of samples. The ESEM mode provides for a gaseous environment in the sample chamber, which allows for imaging of non-conductive samples with no additional conductive coatings needed. The high/low vacuum modes provide for traditional SEM imaging. For all modes, both secondary electron imaging and backscatter electron imaging are available at magnifications up to 150 000x. The Q650 is also equipped with an Oxford Ultim Max 170 large area energy dispersive spectrometer (EDS) and Oxford Nordlys electron backscatter diffraction detector (EBSD) to provide for large area mapping of the chemical signature of a sample surface and high resolution analytics.

Detectors Available:

Everhart Thornley Detector – for secondary electron imaging in high/low vacuum modes

Gaseous Secondary Electron Detector (GSED) – for secondary electron imaging in ESEM mode

Large Field Detector (LFD) – for imaging in low vacuum/ESEM modes

GSED/GAD combo detector – for secondary electron and backscatter electron imaging in ESEM mode

Additional Accessories:

Peltier cooling stage – maintains water on the sample by controlling temperature ±20°C from ambient

Various stage poles, including different angles for properly locating EBSD samples

Multi-sample pole mount – can accommodate up to 6 samples

 

Usage of the ESEM is charged on an hourly basis. All training and reservations for the Q650 ESEM are handled via MDERFH’s iLab Core.